Template synthesis of carbon nanotubes from porous alumina matrix on silicon

Microelectronic Engineering

Volumn 83, Issue 11-12, 2006, Pages 2432-2436

  Gras, R ^a,b   Duvail, J L ^b   Minea T ^b   Dubosc, M ^a,b   Tessier, P Y ^b   Cagnon, L ^c   Coronel, P ^a   Torres, J ^a  

^a STMICROELECTRONICS   (France)

^b INSTITUT DES MATÉRIAUX JEAN ROUXEL   (France)

^c LABORATOIRE DE CRISTALLOGRAPHIE   (France)

Author keywords

Aluminium thin layers; Anodic alumina; Carbon nanotubes; Template

Indexed keywords

ALUMINA; ELECTRODEPOSITION; INTEGRATED CIRCUITS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POROUS MATERIALS; SILICON; SUBSTRATES; THIN FILMS;

ANODIC ALUMINA; CYLINDRICAL NANOPORES; POROUS ALUMINA; TEMPLATE;

CARBON NANOTUBES;

EID: 33751208333     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.10.051     Document Type: Article

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