Microstructure and material properties of electroless CoWP films obtained from sulfamate solutions

Microelectronic Engineering

Volumn 83, Issue 11-12, 2006, Pages 2243-2247

  Sverdlov, Y ^a   Bogush, V ^a   Shacham Diamand, Y ^a  

^a TEL AVIV UNIVERSITY   (Israel)

Author keywords

Cobalt; Electroless deposition; Phosphorous; Sulfamate; Tungsten

Indexed keywords

COBALT COMPOUNDS; ELECTRIC PROPERTIES; ELECTROLESS PLATING; MAGNETIC PROPERTIES; PHOSPHORUS; SURFACE TOPOGRAPHY; THERMODYNAMIC STABILITY; TUNGSTEN;

ELECTROLESS SOLUTION; SODIUM TUNGSTATE; SULFAMATE;

THIN FILMS;

EID: 33751206230     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.10.012     Document Type: Article

References (6)

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