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Volumn 61, Issue , 2004, Pages 129-132
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Dielectric and electrical characteristics of the barium strontium titanate zirconium thin film by RF sputtering
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Author keywords
Barium strontium titanate zirconium; Dielectric properties
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Indexed keywords
BARIUM ALLOYS;
DIELECTRIC PROPERTIES;
ELECTRICAL ENGINEERING;
LEAKAGE CURRENTS;
PERMITTIVITY;
SCANNING ELECTRON MICROSCOPY;
SPUTTERING;
BARIUM STRONTIUM TITANATE ZIRCONIUM;
GROWTH RATE;
LEAKAGE CURRENT DENSITY;
RF SPUTTERING;
THIN FILMS;
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EID: 33751176278
PISSN: 10584587
EISSN: 16078489
Source Type: Conference Proceeding
DOI: 10.1080/10584580490459035 Document Type: Article |
Times cited : (9)
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References (5)
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