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Volumn 61, Issue , 2004, Pages 129-132

Dielectric and electrical characteristics of the barium strontium titanate zirconium thin film by RF sputtering

Author keywords

Barium strontium titanate zirconium; Dielectric properties

Indexed keywords

BARIUM ALLOYS; DIELECTRIC PROPERTIES; ELECTRICAL ENGINEERING; LEAKAGE CURRENTS; PERMITTIVITY; SCANNING ELECTRON MICROSCOPY; SPUTTERING;

EID: 33751176278     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580490459035     Document Type: Article
Times cited : (9)

References (5)
  • 1
    • 0032677761 scopus 로고    scopus 로고
    • 5 films deposited by laser reactive ablation of metallic Ta
    • 5 films deposited by laser reactive ablation of metallic Ta," Thin Solid Films 340, 164-168 (1999).
    • (1999) Thin Solid Films , vol.340 , pp. 164-168
    • Fu, Z.W.1    Chen, L.Y.2    Qin, Q.Z.3
  • 2
  • 3
    • 36549098826 scopus 로고
    • Electrical conductivity of sputtered films of strontium titanate
    • J. Gerblinger and H. Meixner, "Electrical conductivity of sputtered films of strontium titanate." J. Appl. Phys. 67, 7453-7457 (1990).
    • (1990) J. Appl. Phys. , vol.67 , pp. 7453-7457
    • Gerblinger, J.1    Meixner, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.