New digital readout electronics for capacitive sensors by the example of micro-machined gyroscopes

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 557-562

  Gaisser A ^a   Geiger, W ^a   Link, T ^a   Merz, J ^a   Steigmajer, S ^a   Hauser, A ^a   Sandmaier, H ^a,b   Lang, W ^a   Niklasch, N ^c  

^a Institute for Micromachining and Information Technology   (Germany)

^b UNIVERSITY OF STUTTGART   (Germany)

^c ViCon Engineering   (Germany)

Author keywords

Digital readout; Micro machined gyroscope; Readout electronics for capacitive sensors

Indexed keywords

ACCELEROMETERS; ANALOG TO DIGITAL CONVERSION; CAPACITANCE; DIGITAL INSTRUMENTS; DIGITAL SIGNAL PROCESSING; GYROSCOPES; SENSORS;

CAPACITIVE SENSORS; DECOUPLED ANGULAR VELOCITY DETECTOR; DIGITAL READOUT ELECTRONICS; FORCE-TO-REBALANCE LOOPS; INCLINOMETERS; MICROMACHINED GYROSCOPES; TEMPERATURE COMPENSATION;

READOUT SYSTEMS;

EID: 0036544039     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00045-6     Document Type: Conference Paper

References (7)

1. The silicon angular rate sensor system DAVED®
2. Drehratensensor mit entkoppelten orthogonalen primär und sekundärschwingungen
3. A surface micromachined silicon accelerometer with on-chip detection circuitry
4. Undersampling techniques simplify digital radio
5. Certain topics in telegraph transmission theory
6. Gyroinclinometer based on micromachined inertial sensors