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Volumn 89, Issue 20, 2006, Pages
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Structural and electrical properties of low pressure metalorganic chemical vapor deposition grown Eu2O3 films on Si(100)
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
CAPACITANCE MEASUREMENT;
CRYSTAL IMPURITIES;
CRYSTALLINE MATERIALS;
ELECTRIC PROPERTIES;
EUROPIUM COMPOUNDS;
FILM GROWTH;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
MORPHOLOGY;
PERMITTIVITY;
SILICON;
FILM MORPHOLOGY;
NONSTOICHIOMETRY;
STRUCTURAL PROPERTIES;
SEMICONDUCTING FILMS;
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EID: 33751099036
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2388128 Document Type: Article |
Times cited : (7)
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References (16)
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