Fabrication of 3D MEMS toroidal microinductor for high temperature application

Microelectronics Journal

Volumn 37, Issue 11, 2006, Pages 1347-1351

  Lei, Chong ^a   Zhou, Yong ^a   Gao, Xiao Yu ^a   Ding, Wen ^a   Cao, Ying ^a   Zhou, Zhi Min ^a   Choi, Hyung ^b  

^a BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

^b SAMSUNG Electronics   (South Korea)

Author keywords

High temperature application; Microelectromechanical systems (MEMS); Microinductors

Indexed keywords

COMPUTER SIMULATION; HIGH TEMPERATURE APPLICATIONS; PHOTOLITHOGRAPHY; PHOTORESISTORS;

HIGH TEMPERATURE APPLICATION; MICROINDUCTORS; THERMAL DEFORMATION;

MICROELECTROMECHANICAL DEVICES;

EID: 33751080775     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2006.07.005     Document Type: Article

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