Effect of preheating temperature on the deposition rate of TiCN

Surface and Coatings Technology

Volumn 201, Issue 6, 2006, Pages 2818-2821

  Liu, Zhi Jie ^a   Leicht, Peter ^b   Liu, Yi Xiong ^b   Liu, Zi Kui ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b KENNAMETAL INC   (United States)

Author keywords

CVD; Preheating; TiCN

Indexed keywords

COMPUTATIONAL METHODS; PREHEATING; THERMAL EFFECTS; THERMODYNAMICS; VAPOR DEPOSITION;

DEPOSITION RATE; PREHEATING TEMPERATURE; THERMODYNAMIC CALCULATIONS; TITANIUM DEPOSITION;

TITANIUM COMPOUNDS;

COMPUTATIONAL METHODS; PREHEATING; THERMAL EFFECTS; THERMODYNAMICS; TITANIUM COMPOUNDS; VAPOR DEPOSITION;

EID: 33751007815     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.05.034     Document Type: Article

References (8)

1. Liu Z.J., Liu Z.K., McNerny C., Mehrotra P., and Inspektor A. Surf. Coat. Technol. 198 (2005) 161
2. Liu Z.J., McNerny C., Mehrotra P., Liu Y.X., and Liu Z.K. J. Phase Equilib. Diffus. 27 (2006) 30
3. Bull S.J., Bhat D.G., and Staia M.H. Surf. Coat. Technol. 163 (2003) 499-506
4. Bull S.J., Bhat D.G., and Staia M.H. Surf. Coat. Technol. 163 (2003) 507
5. Karlsson L., Hultman L., Johansson M.P., Sundgren J.E., and Ljungcrantz H. Surf. Coat. Technol. 126 (2000) 1
6. Andersson J.O., Helander T., Hoglund L.H., Shi P.F., and Sundman B. CALPHAD 26 (2002) 273
7. S.G.T.E. (SGTE). Thermodynamic Properties of Inorganic Materials vol. 19 (1999), Springer Verlag, Berlin
8. Lide D.R. CRC Handbook of Chemistry and Physics. 76 (1995-1996), CRC Press, New York