On the use of Monte Carlo modeling in the mathematical analysis of scanning electron microscopy-electron beam induced current data

Applied Physics Letters

Volumn 89, Issue 19, 2006, Pages

  Parish, C M ^a   Russell, P E ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISTRIBUTION PARAMETERS; ELECTRON BEAM INDUCED CURRENT (EBIC); MINORITY CARRIERS;

COMPUTER SIMULATION; GALLIUM NITRIDE; INDUCED CURRENTS; LIGHT EMITTING DIODES; MATHEMATICAL MODELS; MONTE CARLO METHODS; SCANNING ELECTRON MICROSCOPY;

ELECTRON BEAMS;

EID: 33750924307     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2385212     Document Type: Article

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