Three-dimensional nanostructure fabrication by focused-ion-beam chemical-vapor-deposition

Microscopy and Microanalysis

Volumn 12, Issue SUPPL. 2, 2006, Pages 130-131

  Matsui, Shinji ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33750861579     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927606069649     Document Type: Conference Paper

References (2)

1. S. Matsui, T. Kaito, J. Fujita, M. Komuro, K. Kanda, and Y. Haruyama, J. Vac. Sci. Tecnol. B 18, 3181 (2000).
2. T. Morita, R. Kometani, K. Watanabe, K. Kanda, Y. Haruyama, T. Hoshino, K. Kondo, T. Kaito, T. Ichihashi, J. Fujita, M. Ishida, Y. Ochiai, T. Tajima, and S. Matsui, J. Vac. Sci. Technol. B21,(2003) 2737