Mo-Ru coatings on tungsten carbide by direct current magnetron sputtering

Thin Solid Films

Volumn 515, Issue 4, 2006, Pages 2207-2212

  Chen, Yung I ^a   Liu, Kuan Ting ^b   Wu, Fan Bean ^a   Duh, Jenq Gong ^b  

^a NATIONAL UNITED UNIVERSITY   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Hardness; Mo Ru; Nanoindentation; Sputtering; Surface roughness

Indexed keywords

COMPOSITION; COST EFFECTIVENESS; MOLYBDENUM; RUTHENIUM; THIN FILMS;

NANOSCALE; ROOM TEMPERATURE; TEMPERATURE RANGE;

TUNGSTEN CARBIDE;

EID: 33750816253     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.03.039     Document Type: Article

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