A preliminary study of space charge distribution measurements at nanometer spatial resolution

IEEE Transactions on Dielectrics and Electrical Insulation

Volumn 13, Issue 5, 2006, Pages 1036-1041

  Dagher, Gulnar ^a   Hole, Stéphane ^a   Lewiner, Jacques ^b  

^a SORBONNE UNIVERSITÉ   (France)

^b PSL RESEARCH UNIVERSITY   (France)

Author keywords

Femtosecond laser; Nanometer resolution; Pressure wave propagation method; Pulsed electro acoustic method; Space charge; Thermal method

Indexed keywords

ACOUSTOELECTRIC EFFECTS; ELECTRIC SPACE CHARGE; INTEGRATED CIRCUITS; LASER PULSES; MICROELECTROMECHANICAL DEVICES;

FEMTOSECOND LASERS; NANOMETER RESOLUTION; PRESSURE WAVE PROPAGATION; PULSED ELECTRO-ACOUSTIC METHOD; THERMAL METHOD;

ELECTRIC INSULATION;

EID: 33750811717     PISSN: 10709878     EISSN: None     Source Type: Journal    
DOI: 10.1109/TDEI.2006.247829     Document Type: Conference Paper

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