Si-C multilayer quasi crystals preparation by DC magnetron sputtering

Microelectronics Journal

Volumn 37, Issue 12, 2006, Pages 1538-1542

  Golan, G ^a   Axelevitch, A ^a   Gorenstein, B ^a  

^a HOLON INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

C V measurement; Magnetron sputtering; Si C multilayer

Indexed keywords

ARGON; ENERGY GAP; MAGNETRON SPUTTERING; SEMICONDUCTOR MATERIALS; SILICON; THIN FILMS;

ARGON PLASMA ENVIRONMENT; C-V MEASUREMENT; RELATIVE PERMITTIVITY; SI-C MULTILAYERS;

QUASICRYSTALS;

EID: 33750744805     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2006.05.016     Document Type: Article

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