Ring etching zones on magnetron sputtering targets

Thin Solid Films

Volumn 300, Issue 1-2, 1997, Pages 72-77

  Golan, G ^a   Axelevitch, A ^a  

^a OPEN UNIVERSITY OF ISRAEL   (Israel)

Author keywords

Coatings; Corrosion; Ion bombardment; Sputtering

Indexed keywords

COATINGS; CORROSION; ESTIMATION; ETCHING; ION BOMBARDMENT; VACUUM APPLICATIONS;

RING ETCHING ZONES;

MAGNETRON SPUTTERING;

EID: 0031141120     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09498-9     Document Type: Article

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