Microwave PECVD of nanocrystalline diamond with rf induced bias nucleation

Czechoslovak Journal of Physics

Volumn 56, Issue SUPPL. 2, 2006, Pages

  Frgala, Z ^a   Jasek O ^a   Karaskova M ^a   Zajickova L ^a   Bursikova V ^a   Franta, D ^a   Matejkova J ^b   Rek, A ^b   Klapetek, P ^c   Bursik J ^d  

^a MASARYK UNIVERSITY   (Czech Republic)

^b INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

^c CZECH METROLOGY INSTITUTE   (Czech Republic)

^d INSTITUTE OF PHYSICS OF MATERIALS   (Czech Republic)

Author keywords

Nanocrystalline diamond; Plasma enhanced chemical vapor deposition; Self bias

Indexed keywords

EID: 33750726785     PISSN: 00114626     EISSN: 15729486     Source Type: Journal    
DOI: 10.1007/s10582-006-0353-6     Document Type: Article

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