Development of Mg/SiC multilayer mirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6317, Issue , 2006, Pages

  Murakami, Go ^a   Yoshioka, Kazuo ^a   Yoshikawa, Ichiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

EUV; Mg Sic; Mo Si; Multilayer mirror; Planetary atmosphere

Indexed keywords

LIGHT REFLECTION; MULTILAYERS; SILICON CARBIDE; ULTRAVIOLET RADIATION; VACUUM APPLICATIONS;

EXTREME ULTRAVIOLET (EUV); MULTILAYER COATING MIRRORS; PLANETARY ATMOSPHERE;

MIRRORS;

EID: 33750589840     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.679965     Document Type: Conference Paper

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