New multilayer coating for 30.4 nm radiation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5533, Issue , 2004, Pages 163-170

  Yoshikawa, Ichiro ^a   Murachi, Tetsunori ^a  

^a JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

Author keywords

EUV; Mg SiC; Mo Si; Multilayer mirror; Planetary atmospheres

Indexed keywords

COATINGS; OPTICS; PROTECTIVE ATMOSPHERES; RADIATION; REFLECTION; VACUUM;

EUV; MG/SIC; MO/SI; MULTILAYER MIRRORS; PLANETARY ATMOSPHERES;

MULTILAYERS;

EID: 15744376900     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.558976     Document Type: Conference Paper

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