Improving preventive maintenance scheduling in semiconductor fabrication facilities

Production Planning and Control

Volumn 17, Issue 7, 2006, Pages 742-754

  Crespo Marquez, A ^a   Gupta, J N D ^b   Ignizio, J P ^c  

^a UNIVERSITY OF SEVILLE   (Spain)

^b UNIVERSITY OF ALABAMA IN HUNTSVILLE   (United States)

^c INTEL CORPORATION   (United States)

Author keywords

Preventive maintenance scheduling; Semiconductor wafer manufacturing; System simulation

Indexed keywords

COMPUTER SIMULATION; FABRICATION; MONTE CARLO METHODS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; STATISTICAL METHODS;

SEMICONDUCTOR FABRICATION FACILITIES; SEMICONDUCTOR WAFER MANUFACTURING; SHOP LEVEL MAINTENANCE; SYSTEM SIMULATION;

PREVENTIVE MAINTENANCE;

EID: 33750552335     PISSN: 09537287     EISSN: 13665871     Source Type: Journal    
DOI: 10.1080/09537280600901525     Document Type: Article

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