Structural evolution of boron nitride films grown on diamond buffer-layers

Thin Solid Films

Volumn 515, Issue 3, 2006, Pages 973-978

  Huang, Po Chih ^a   Yang, Tien Syh ^b   Chu, Shou Shu ^a   Wong, Ming Show ^a  

^a NATIONAL DONG HWA UNIVERSITY   (Taiwan)

^b TZU CHI COLLEGE OF TECHNOLOGY   (Taiwan)

Author keywords

Boron nitride; Cubic boron nitride; Nanocrystalline diamond film

Indexed keywords

BORON COMPOUNDS; CRYSTAL GROWTH; CRYSTALLINE MATERIALS; CUBIC BORON NITRIDE; FILM GROWTH; GRAIN SIZE AND SHAPE; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE ROUGHNESS;

BORON NITRIDE; BUFFER LAYERS; MICROCRYSTALLINE DIAMOND FILMS; NANOCRYSTALLINE DIAMOND FILM;

DIAMOND FILMS;

EID: 33750485377     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.07.077     Document Type: Article

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