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Volumn , Issue , 2006, Pages 152-154
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A micromachined inking chip for scanning probe nanolithography using local thermal vapor inking method
a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
CONTAMINATION;
GOLD COATINGS;
MICROSYSTEMS;
NANOLITHOGRAPHY;
SCANNING;
16-MERCAPTOHEXADECANOIC ACID;
CROSS CONTAMINATION;
ETHANOL SOLUTIONS;
MICRO-MACHINED;
RESISTIVE HEATERS;
SCANNING PROBE NANO-LITHOGRAPHY;
SCANNING PROBES;
SILICON SUBSTRATES;
SOLID-STATE SENSORS;
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EID: 33750478037
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (8)
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