Fabrication and properties of ZAO powder, sputtering target materials and the related films

Journal of University of Science and Technology Beijing: Mineral Metallurgy Materials (Eng Ed)

Volumn 13, Issue 4, 2006, Pages 346-349

  Shao, Wei ^a   Ma, Ruixin ^a   Liu, Bin ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

Al doped zinc oxide; Chemical coprecipitation; Sputtering target materials; Transparent conductive film

Indexed keywords

ALUMINUM; CONDUCTIVE FILMS; CRYSTAL ORIENTATION; DOPING (ADDITIVES); FILM PREPARATION; MAGNETRON SPUTTERING; SYNTHESIS (CHEMICAL); TRANSPARENCY;

ALUMINUM DOPED ZINC OXIDE (ZAO); CHEMICAL COPRECIPITATION; SPUTTERING TARGET MATERIALS; TRANSMITTANCE; TRANSPARENT CONDUCTIVE FILM;

ZINC OXIDE;

EID: 33750415833     PISSN: 10058850     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1005-8850(06)60071-6     Document Type: Article

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