Research on precise traveling positioning stage driven by piezoelectric bimorph

Guangxue Jingmi Gongcheng/Optics and Precision Engineering

Volumn 14, Issue 4, 2006, Pages 635-640

  Hua, Shun Ming ^a   Zhang, Hong Zhuang ^a   Cheng, Guang Ming ^a   Fan, Zun Qiang ^a   Liu, Jian Fang ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

Micro robot; Micro manipulation; Piezoelectric bimorph; Precise positioning stage; Stick slip effect

Indexed keywords

ACTUATORS; BEARING CAPACITY; MATHEMATICAL MODELS; MICROMANIPULATORS; POSITION CONTROL; ROBOTS;

MICRO MANIPULATION; MICRO ROBOT; PIEZOELECTRIC BIMORPH; PRECISE POSITIONING STAGE; STICK SLIP EFFECT;

PIEZOELECTRIC DEVICES;

EID: 33750398406     PISSN: 1004924X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

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