Process-induced deformations and stacking faults in 4H-SiC

Materials Research Society Symposium Proceedings

Volumn 911, Issue , 2006, Pages 145-150

  Okojie, Robert S ^a   Huang, Xianrong ^b   Dudley, Michael ^b   Zhang, Ming ^c   Pirouz, Pirouz ^c  

^a NASA HEADQUARTERS   (United States)

^b Stony Brook University   (United States)

^c Case Western Reserve University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; POLISHING; STACKING FAULTS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

EPILAYERS; FILM STRESS MEASUREMENT (FSM); MECHANICAL POLISHING; WARPAGE;

SILICON CARBIDE;

EID: 33750308909     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-0911-b07-02     Document Type: Conference Paper

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