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Volumn 2006, Issue , 2006, Pages 302-305

Reconstituted wafer technology for heterogeneous integration

Author keywords

[No Author keywords available]

Indexed keywords

BATCH PROCESSING; CARRIER WAFERS; SUB-MICRON ACCURACY; THERMAL BUDGET;

EID: 33750139339     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (6)

References (7)
  • 2
    • 0035278843 scopus 로고    scopus 로고
    • Microstructure to substrate self-assembly using capillary forces
    • U. Srinivasan et al., "Microstructure to substrate self-assembly using capillary forces," JMEMS, 10, pp. 17-24 (2001)
    • (2001) JMEMS , vol.10 , pp. 17-24
    • Srinivasan, U.1
  • 3
    • 0036927784 scopus 로고    scopus 로고
    • Recent progress in modularly integrated MEMS technologies
    • T.-J. King et al., "Recent progress in modularly integrated MEMS technologies," IEDM Tech. Dig., pp. 199-202 (2002)
    • (2002) IEDM Tech. Dig. , pp. 199-202
    • King, T.-J.1
  • 4
    • 0028445213 scopus 로고
    • Fluidic assembly for the integration of GaAs light-emitting diodes on Si substrates
    • H.-J. J. Yeh et al., "Fluidic assembly for the integration of GaAs light-emitting diodes on Si substrates," IEEE Phot. Tech. Lett., 6, pp. 706-708 (1994)
    • (1994) IEEE Phot. Tech. Lett. , vol.6 , pp. 706-708
    • Yeh, H.-J.J.1
  • 6
    • 84944730634 scopus 로고    scopus 로고
    • Controlled modification of micromachined silicon surfaces using colloidal micro- and nano- particles
    • V.T. Srikar et al., "Controlled modification of micromachined silicon surfaces using colloidal micro- and nano- particles" Proc. Transducers '03, pp. 726-729 (2003)
    • (2003) Proc. Transducers '03 , pp. 726-729
    • Srikar, V.T.1
  • 7
    • 26444523574 scopus 로고    scopus 로고
    • Thermal budget limits of quarter-micrometer foundry CMOS for post-processing of MEMS devices
    • H. Takeuchi et al. "Thermal budget limits of quarter-micrometer foundry CMOS for post-processing of MEMS devices," IEEE Trans. Electron Devices, 52, pp. 2081-2086 (2005)
    • (2005) IEEE Trans. Electron Devices , vol.52 , pp. 2081-2086
    • Takeuchi, H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.