Structural and electrical properties of TiNxOy Thin-film resistors for 30 dB applications of π-type attenuator

Journal of the Electrochemical Society

Volumn 153, Issue 9, 2006, Pages

  Cuong, Nguyen Duy ^a   Kim, Dung Jin ^b   Kang, Byoung Don ^a,b   Yoon, Soon Gil ^a  

^a Chungnam National University   (South Korea)

^b KMC Technology Co Ltd   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLINE MATERIALS; ELECTRIC PROPERTIES; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; RESISTORS; THERMODYNAMIC PROPERTIES; THIN FILM TRANSISTORS;

ANNEALING TEMPERATURES; THIN-FILM RESISTORS; TITANIUM OXYHONITRIDES;

TITANIUM NITRIDE;

EID: 33750124020     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2219707     Document Type: Article

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