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Volumn 180-181, Issue , 2004, Pages 136-139
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Contact property between metal and tantalum nitride film characterized by using transmission line model
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Author keywords
Specific contact resistivity; TaNx resistor; Temperature coefficient of resistance; Thin film sub mount module; Transmission line model
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Indexed keywords
ELECTRIC CONDUCTIVITY;
ELECTRIC LINES;
ELECTRODES;
GOLD;
PACKAGING;
SPUTTERING;
SURFACE ROUGHNESS;
METAL ELECTRODES;
REACTIVE SPUTTERING;
TANTALUM COMPOUNDS;
COATING;
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EID: 16744368392
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2003.10.053 Document Type: Article |
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Times cited : (11)
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References (5)
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