Micro capacitive inclination sensor utilizing dielectric nano-particles

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 706-709

  Ueda, H ^a   Ueno, H ^a   Itoigawa, K ^a   Hattori, T ^b  

^a Tokai Rika Co Ltd   (Japan)

^b UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; DIELECTRIC DEVICES; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; OPTIMIZATION; PERMITTIVITY;

DIELECTRIC NANOPARTICLES; DIELECTRIC OIL; INCLINATION ANGLE; MINIATURIZE INCLINATION SENSORS;

MICROSENSORS;

EID: 33750108880     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. R. Nagato, H. Hosaka, K. Sakamoto, "A TWO-DOF INCLINATION SENSOR BASED ON A SHELL-FISH'S BALANCING ORGAN", TRANSDUCERS '99,Sendai, June7-10, 1999, pp.1554-1557.
2. S. Billat, H. Glosch, M. Kunze, F. Hedrich, J. Frech, J. Auber, H. Sandmaier, "Micromachined inclinometer with high sensitivity and very good stability", TRANSDUCERS '01, Munich, June10-14, 2001, pp.1488-1491.
3. R.A. Yotter, R.R. Baxter, S. Ohno, S.D. Hawley, D.M. Wilson, "ON A MICROMACHINED FLUIDIC INCLINOMETER", TRANSDUCERS '03, Boston, June8-12, 2003, pp. 1279-1282.
4. H. Ueda, H. Ueno, K. Itoigawa, H. Hattori, "Development of Micro Capacitive Inclination Sensor", Proceedings of THE 22nd SENSOR SYMPOSIUM 2005, Tokyo, Oct20-21, 2005, pp. 207-211.
5. H. Kawamoto et al, "A Study of Capacitance Type Incline Sensor", Institute of Electric and Electronics Engineers of Japan, Vol.R83-56, pp.13-18, 1984.