Model-based shape from shading for microelectronics applications

International Journal of Imaging Systems and Technology

Volumn 16, Issue 2, 2006, Pages 65-76

  Nissenboim, A ^a   Bruckstein, A M ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

Model based SFS; SEM images; Shape from shading; Wafer inspection

Indexed keywords

ALGORITHMS; CONVERGENCE OF NUMERICAL METHODS; FEATURE EXTRACTION; OPTIMIZATION; PROBLEM SOLVING; SCANNING ELECTRON MICROSCOPY;

LEVENBERG-MARGUARDT (LM) OPTIMIZATION; MODEL BASED SFS; WAFER INSPECTION;

MICROELECTRONICS;

EID: 33750037039     PISSN: 08999457     EISSN: 10981098     Source Type: Journal    
DOI: 10.1002/ima.20065     Document Type: Article

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