Defect structure in micropillars using x-ray microdiffraction

Applied Physics Letters

Volumn 89, Issue 15, 2006, Pages

  Maass R ^a   Grolimund, D ^a   Van Petegem, S ^a   Willimann, M ^a   Jensen, M ^a   Van Swygenhoven, H ^a   Lehnert, T ^b   Gijs, M A M ^b   Volkert, C A ^c   Lilleodden, E T ^c   Schwaiger, R ^c  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b EPFL   (Switzerland)

^c KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FOCUSED ION BEAMS (FIB); METALLIC PILLARS; MICRODIFFRACTION; STRAIN GRADIENTS;

DEFECTS; ION BEAMS; REACTIVE ION ETCHING; STRAIN; X RAY DIFFRACTION;

MICROSTRUCTURE;

EID: 33750004871     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2358204     Document Type: Article

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