Driving of optical fiber by surface-micromachined cam-micromotor for the applications to variable optical attenuator

2003 IEEE/LEOS International Conference on Optical MEMS

Volumn , Issue , 2003, Pages 119-120

  Kanamori, Y ^a   Aoki, Y ^a   Sasaki, M ^a   Hosoya, H ^b   Wada, A ^b   Hane, K ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b FUJIKURA LTD   (Japan)

Author keywords

Etching; Frequency; Helium; Mechatronics; Optical attenuators; Optical fibers; Optical surface waves; Stators; Voltage; Wavelength division multiplexing

Indexed keywords

CAMS; ELECTRIC ATTENUATORS; ELECTRIC POTENTIAL; ETCHING; FIBERS; HELIUM; MECHATRONICS; MICROMOTORS; MOEMS; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; STATORS; SURFACE WAVES; WAVELENGTH DIVISION MULTIPLEXING;

COUPLING EFFICIENCY; DIRECTLY-DRIVEN; FREQUENCY; MICRO-MACHINED; OPTICAL ATTENUATORS; OPTICAL SURFACE WAVES; VARIABLE OPTICAL ATTENUATORS;

ELECTROMAGNETIC WAVE ATTENUATION;

EID: 33750002463     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2003.1233495     Document Type: Conference Paper

References (3)

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2. L. Li, J G. Brown and D. Uttamchandani, J. Micromech. Microeng. 12 (2002) 736.
3. P. E. Kladitis, R. J. Linderman and V. M. Bright, Proc. MEMS 2001 (2001) 598.