Surface morphology, microstructure and mechanical properties of thin Ag films

Proceedings - KORUS 2003: 7th Korea-Russia International Symposium on Science and Technology

Volumn 1, Issue , 2003, Pages 21-29

  Shugurov, A ^a   Panin, A ^a   Chun, Hui Gon ^b   Oskomov, K ^c  

^a INSTITUTE OF STRENGTH PHYSICS AND MATERIALS SCIENCE   (Russian Federation)

^b University of Ulsan   (South Korea)

^c INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

Author keywords

Annealing; Atomic force microscopy; Mechanical factors; Microstructure; Semiconductor films; Sputtering; Substrates; Surface morphology; Surface topography; Temperature

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; FRACTAL DIMENSION; HARDNESS; MICROSTRUCTURE; SILVER; SPUTTERING; SUBSTRATES; SURFACE MORPHOLOGY; SURFACE TOPOGRAPHY; TEMPERATURE; YIELD STRESS;

DC MAGNETRON SPUTTERING; MECHANICAL FACTORS; MICROSTRUCTURE AND MECHANICAL PROPERTIES; NANOINDENTATION TECHNIQUES; QUANTITATIVE ESTIMATION; SCANNING TUNNELING AND ATOMIC FORCE MICROSCOPY; SEMICONDUCTOR FILMS; SURFACE FRACTAL DIMENSIONS;

TOPOGRAPHY;

EID: 33749871462     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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