Modeling resist response in holographic formation of three-dimension photonic crystal templates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6343 II, Issue , 2006, Pages

  Abolghasemi, Ladan E ^a   Chanda, Debashis ^a   Herman, Peter R ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

Band gap; Holographic lithography; Interference lithography; Modeling; Photonic Crystals

Indexed keywords

CRYSTAL LATTICES; ELECTRIC RESISTANCE; HOLOGRAPHY; LITHOGRAPHY; MATHEMATICAL MODELS; REACTION KINETICS;

BAND GAP; HOLOGRAPHIC LITHOGRAPHY; INTERFERENCE LITHOGRAPHY; PHOTONIC CRYSTALS;

PHOTONS;

EID: 33749857459     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.710618     Document Type: Conference Paper

References (8)

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