Concave reflective SU-8 photoresist gratings for flat-field integrated spectrometers

Applied Optics

Volumn 45, Issue 23, 2006, Pages 5877-5880

  Zauner, Dan A ^a   Jorgensen, Anders M ^a   Anhoj, Thomas A ^a   Hübner, Jörg ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COST EFFECTIVENESS; DIFFRACTION GRATINGS; MICROOPTICS; SILICON; SPECTROMETERS;

CONCAVE REFLECTIVE SU-8 PHOTORESIST GRATINGS; FLAT-FIELD INTEGRATED SPECTROMETERS; POLYMER-ON-SILICON;

PHOTORESISTS;

EID: 33749841293     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.005877     Document Type: Article

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