Specific contact resistance measurements of metal-semiconductor junctions

IEEE International Conference on Microelectronic Test Structures

Volumn 2006, Issue , 2006, Pages 13-17

  Stavitski, N ^a   Van Dal, M J H ^b   Wolters, R A M ^a,b   Kovalgin, A Y ^a   Schmitz, J ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT RESISTANCE; ELECTRICAL TESTING; SILICIDES; TRANSMISSION LINE MODEL (TLM);

ELECTRIC LINES; ELECTRIC RESISTANCE; MATHEMATICAL MODELS; METAL INSULATOR BOUNDARIES; SEMICONDUCTING SILICON; TRANSMISSION LINE THEORY;

SEMICONDUCTOR JUNCTIONS;

EID: 33749505372     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMTS.2006.1614265     Document Type: Conference Paper

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