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Volumn 102, Issue 1, 2006, Pages 266-271

Effects of the photoacid generator type on the imaging and thermal decomposition properties of photodefinable, thermally sacrificial poly(propylene carbonate) materials

Author keywords

Catalysis; Imaging; Photoresists; Polycarbonates; Thermal properties

Indexed keywords

IMAGING PROPERTIES; MICROCHANNEL SYSTEMS; POLY(PROPYLENE CARBONATE); SACRIFICIAL POLYMER SYSTEM;

EID: 33749459367     PISSN: 00218995     EISSN: 10974628     Source Type: Journal    
DOI: 10.1002/app.23724     Document Type: Article
Times cited : (6)

References (11)
  • 8
    • 33749466310 scopus 로고    scopus 로고
    • L. F. Thompson. In Introduction to Microlithography; Thompson, L.; Willson, C.; Bowden, M., Eds.; American Chemical Society: Washington, DC, 1994; p 269
    • L. F. Thompson. In Introduction to Microlithography; Thompson, L.; Willson, C.; Bowden, M., Eds.; American Chemical Society: Washington, DC, 1994; p 269.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.