Characterization of in situ diffusion of silver in Ge-Te amorphous films for programmable metallization cell memory applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 5, 2006, Pages 2312-2316

  Lee, Soo Jin ^a   Yoon, Soon Gil ^a   Choi, Kyu Jeong ^b   Ryu, Sang Ouk ^b   Yoon, Sung Min ^b   Lee, Nam Yeal ^b   Yu, Byoung Gon ^b  

^a Chungnam National University   (South Korea)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; DATA STORAGE EQUIPMENT; ELECTROLYTES; GERMANIUM COMPOUNDS; METALLIZING; SPUTTERING; SWITCHING;

CELL MEMORY APPLICATIONS; GLASS FILMS; PROGRAMMABLE METALLIZATION CELLS (PMC); REPRODUCIBLE MEMORY CHARACTERISTICS;

DIFFUSION;

EID: 33749396933     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2348884     Document Type: Article

References (15)

1. G. Muller, T. Happ, M. Kund, G. Y. Lee, N. Nagel, and R. Sezi, Tech. Dig. - Int. Electron Devices Meet. 2004, 567.
2. M. N. Kozicki, C. Gopalan, M. Balakrishnan, M. Park, and M. Mitkova, Proceedings of the 2004 Non-volatile Memory Technology Symposium, Orlando, FL, 10-17 November 2004 (unpublished).
3. M. N. Kozicki, M. Park, and M. Mitkova, IEEE Trans. Nanotechnol. 4, 331 (2005).
4. M. Mitkova, M. N. Kozicki, H. C. Kim, and T. L. Alford, Thin Solid Films 449, 248 (2004).
5. S. Maruno and S. Ban, Jpn. J. Appl. Phys. 19, 97 (1980).
6. T. Kawaguchi and S. Maruno, J. Appl. Phys. 71, 2195 (1992).
7. M. N. Kozicki, M. Mitkova, J. Zhu, and M. Park, Microelectron. Eng. 163, 155 (2002).
8. M. N. Kozicki, M. Mitkova, M. Park, M. Balakrishnan, and C. Gopalan, Superlattices Microstruct. 34, 459 (2003).
9. J. Pick, B. Nicolas, C. Rivero, K. Eishot, R. Irwin, K. A. Richardson, M. Fisher, and R. Vallee, Thin Solid Films 418, 215 (2002).
10. F. Betts, A. Bienenstock, D. T. Keating, and J. P. de Neufville, J. Non-Cryst. Solids 7, 417 (1972).
11. M. Sakurai, F. Kakinuma, E. Matsubara, and K. Suzuki, J. Non-Cryst. Solids 312-314, 585 (2002).
12. Y. Kameda, O. Uemura, and T. Usuki, Mater. Trans., JIM 37, 1655 (1996).
13. R. A. Ligero, M. Gasa-Ruiza, M. P. Trujillo, A. Grozco, and R. Jimenez-Garay, Phys. Chem. Glasses 35, 115 (1994).
14. J. F. Moulder, W. F. Stickle, P. E. Sobol, and K. D. Bomben, in Handbook of X-ray Photoelectron Spectroscopy, edited by J. Chastain and R. C. King (Physical Electronics, Inc., Eden Prairie, 1995), Vol. 10, p. 121/131.
15. E. A. Brandes, Smithells Metals Reference Book (Butterworths, London, 1983), p. 11-21/22.