Nanometre precision mechanisms

Measurement and Control

Volumn 31, Issue 2, 1998, Pages 37-42

  Atherton, Paul D ^a  

^a Queensgate Instruments Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CLOSED LOOP CONTROL SYSTEMS; DEGREES OF FREEDOM (MECHANICS); DIGITAL CONTROL SYSTEMS; DIGITAL SIGNAL PROCESSING; DISTANCE MEASUREMENT; FEEDBACK CONTROL; NANOTECHNOLOGY; PIEZOELECTRIC TRANSDUCERS; POSITION CONTROL; SENSORS; THREE TERM CONTROL SYSTEMS;

CAPACITANCE POSITION SENSORS; FLEXURE GUIDED STAGES; MULTI AXIS POSITIONERS; NANOMETER PRECISION MECHANISMS; PIEZOELECTRIC TRANSLATORS;

PRECISION ENGINEERING;

EID: 0032027808     PISSN: 00202940     EISSN: None     Source Type: Journal    
DOI: 10.1177/002029409803100202     Document Type: Article

References (3)

1. The Nanopositioning Book, Queensgate Instruments Ltd, 1997
2. P. D. Atherton, Y. Xu and M. McConnell, "New x-y stage for positioning and scanning", Proceedings of SPIE's Annual Meeting, Aug. 1996, Denver, USA
3. S. T. Smith and D. G. Chetwynd, Foundations of Ultraprecision Mechanism Design, Gordon and Breach Science Publishers, 1992