MOEMS laser tuning element with an indirect drive

IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

Volumn , Issue , 2005, Pages 11-12

  Syms, R R A ^a   Lohmann, A ^a   Huang, W ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

External cavity laser; Grating; Optical MEMS

Indexed keywords

ACTUATORS; DIFFRACTION GRATINGS; LASER TUNING; MICROELECTROMECHANICAL DEVICES;

ETCHED BLAZED GRATING; EXTERNAL CAVITY LASERS; OPTICAL MEMS; TUNING ACTUATORS;

OPTICAL DEVICES;

EID: 33749077967     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2005.1540051     Document Type: Conference Paper

References (3)

1. Lohmann A., Syms R.R.A. "External cavity laser with a vertically-etched silicon blazed grating" IEEE Photon. Tech. Lett. 15, 120-122 (2003)
2. Syms R.R.A., Lohmann A. "MOEMS tuning element for a Littrow external cavity laser" IEEE/ASME J. Microelectromech. Syst. 12, 921-928 (2003)
3. Liu A.Q., Zhang X.M., Li J., Lu C. "Single-/multi-mode tunable lasers using MEMS mirror and grating" Sensors and Actuators A108, 49-53 (2003)