Silicon masking layers for fabrication of high aspect ratio MEMS

IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

Volumn , Issue , 2005, Pages 85-86

  Lee, Daesung ^a   Solgaard, Olav ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

Bonding; DRIE; High aspect ratio MEMS; KOH; Vertical micromirrors

Indexed keywords

ASPECT RATIO; ETCHING; MASKS; MIRRORS; PHOTOLITHOGRAPHY; SILICON; SUBSTRATES;

SILICON MASKING; STRUCTURED SUBSTRATE; VERTICAL MIRROR FABRICATION;

MICROELECTROMECHANICAL DEVICES;

EID: 33749074286     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2005.1540089     Document Type: Conference Paper

References (6)

1. V. Milanovic, "Multilevel-beam SOI-MEMS fabrication and applications", IEEE Journal of Microelectromechanical Systems, vol. 13, no. 1, February 2004, pp. 19-30
2. D. Lee, O. Solgaard, "Two-axis gimbaled microscanner in double SOI layers actuated by self-aligned vertical electrostatic combdrive", Proc. of the Solid-State Sensor and Actuator Workshop, Hilton Head 2004, SC, USA, June 2004, pp. 352-355
3. D. Lee, K. Yu, U. Krishnamoorthy, O. Solgaard, "Vertical micromirror fabricated in (110) silicon device layer by combination of KOH and DRIE etch", Proc. IEEE/LEOS Int. Conf. on Optical MEMS 2004, Takamatsu, Japan, August 2004, pp. 174-175
4. X. Li, R. Belikov, K. Yu, O. Solgaard, "Micromachined tunable blazed gratings", Proc. IEEE/LEOS Int. Conf. on Optical MEMS 2004, Takamatsu, Japan, August 2004, pp. 6-7
5. K. Yu, D. Lee, O. Solgaard, "Variable Bandwidth Optical Filters with Vertical Micromirrors and Silicon Optical Bench Alignment Technology", 2004 IEEE/LEOS Annual Meeting Conference Proceedings, Puerto Rico, November 2004
6. K. Yu, D. Lee, U. Krishnamoorthy, N. Park, O. Solgaard, "Micromaehined Fourier Transform Spectrometer on Silicon Optical Bench Platform", accepted to Transducers'05, Seoul, Korea, June 2005