An investigation of femtosecond laser micromachining

Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005

Volumn , Issue , 2005, Pages 296-300

  Xia, Ming ^a   Tu, Yiliu ^a  

^a UNIVERSITY OF CALGARY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAMS; LASER PULSES; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; SEMICONDUCTOR MATERIALS;

BIOMEDICINES; FEMTOSECOND LASERS; INDUSTRIAL MATERIAL PROCESSING; MEMS;

MICROMACHINING;

EID: 33749056845     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2005.24     Document Type: Conference Paper

References (10)

1. Marco Arrigoni, "Femtosecond lasers: Carve out a niche in micromachining, " Photonics Spectra, v 38, n 6, June, 2004, pp. 73-80.
2. Orazio Svelto, Principles of Lasers, 4th edition, New York, Plenum Press, 1998.
3. C. Momma, S. Nolte, A. Tuennermann, "Femtosecond micromachining," Conference on Lasers and Electro-Optics Europe - Technical Digest, CWM1, 1998, pp. 229.
4. S. Bruneau, J. Hermann, M. Sentis, G. Dumitru, V. Romano, H. P. Weber, A. Semerok, W. Marine, "Femtosecond laser ablation of materials", Proceedings of SPIE - The International Society for Optical Engineering, v 5147, AlT'02 International Conference on Advanced Laser Technologies, 2003, pp. 199-203.
5. S. O. Konorov, A. B. Fedotov, A. M. Zheltikov, "Three-dimensional reversible laser micromachining with subnanojoule femtosecond pulses based on two-photon photochromism," Applied Physics B: Lasers and Optics, v 76, n 6, June, 2003, pp. 707-710.
6. Chris B. Schaffer, Andre Brodeur, Jose F. Garcia, Eric Mazur, "Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy," Optics Letters, v 26, n 2, Jan 15, 2001, pp. 93-95.
7. Chris B. Schaffer, Tyson N. Kim, Jose F. Garcia, Eric Mazur, Alexander Groisman, David Kleinfeld, "Micromachining of bulk transparent materials using nanojoule femtosecond laser pulses," Proceedings of SPIE -The International Society for Optical Engineering, v 5273, 35th Annual Boulder Damage Symposium Proceedings: Laser-Induced Damage in Optical Materials 2003, 2004, pp. 469-471.
8. M. El-Bandrawy, Mool C. Gupta, "Femtosecond laser micromachining of submicron features," OSA Trends in Optics and Photonics Series, v 88, Conference on Lasers and Electro- Optics (CLEO); Postconference Digest, 2003, pp. 1972.
9. K. Venkatakrishnan, B. Tan, B. K. A. Ngoi, "Femtosecond pulsed laser ablation of thin gold film," Optics and Laser Technology, v 34, n 3, April, 2002, pp. 199- 202.
10. B. N. Kov, F. Korte, J. Koch, S. Nolte, A. Ostendorf, "Femtosecond laser ablation and nanostructuring," Proceedings of SPIE - The International Society for Optical Engineering, v 4760, n I, 2002, pp. 19-24.