Design and simulation of RF MEMS cantilever and bridge switches for high switching speed and low voltage operation and their comparison

ISSCS 2005: International Symposium on Signals, Circuits and Systems - Proceedings

Volumn 1, Issue , 2005, Pages 131-134

  Saha, Shimul Chandra ^a   Singh, Tajeshwar ^a   Sæther, Trond ^a  

^a NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC POTENTIAL; MATHEMATICAL MODELS; SWITCHING SYSTEMS; ULTRASONIC IMAGING; ULTRASONIC TRANSDUCERS;

CAPACITIVE CONTACT; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT); SWITCHING SPEED;

MICROELECTROMECHANICAL DEVICES;

EID: 33749048471     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISSCS.2005.1509868     Document Type: Conference Paper

References (5)

1. B. Bayram, "A new regime for operating capacitive mciromachined ultrasonic transducer?", IEEE Transactions on UFFC, Vol.50, No.9.09/03
2. J.B. Muldavin, "Nonlinear electro-mechanical modeling of MEMS switches", IEEE MTT-S Digest 2001
3. D. Peroulis, "Electromechanical considerations in developing low-voltage RF MEMS switches", IEEE Transactions on MTT, Vol.51, No. 1 January 2003.
4. N. Nishijima, "A Low-voltage high contacts force RF-MEMS switch. IEEE MTT-S Digest, 2004.
5. G.M. Rebeiz, "RF MEMS Theory, Design and Technology", 1st ed. New York: Wiley, 2003, Ch 3.5.