Optical actuation of MEMS micro-gears through radiation pressure

IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

Volumn , Issue , 2005, Pages 61-62

  Gauthier, R C ^a   Tait, R N ^a  

^a CARLETON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MICROMACHINING; OPTICAL PROPERTIES; POLYIMIDES; RADIATION;

GEAR STRUCTURES; LASER TRAPPING; OPTICAL ACTUATION; OPTICAL MANIPULATION;

MICROELECTROMECHANICAL DEVICES;

EID: 33749043025     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2005.1540076     Document Type: Conference Paper

References (4)

1. A. Ashkin, "Acceleration and trapping of particles by radiation pressure," Phys. Rev. Lett. 24, 156-159 (1970).
2. A. Ashkin, J. M. Dziedzic, J. E. Bjorkholm and S. Chu, "Observation of a single-beam gradient force optical trap for dielectric particles," Opt. Lett., 288-290 (1986).
3. R. C. Gauthier, R. N. Tait, H. Mende and C. Pawlowicz, "Optical selection, manipulation, trapping, and activation of a microgear structure for applications in micro-optical-electromechanical systems," Appl. Opt. 40, 930-937 (2001).
4. R. C. Gauthier, R. N. tait and M. Ubriaco, "Activation of microcomponents with light for micro-electro-mechanical systems and micro-optical-electro-mechanical systems applications," Appl. Opt. 41, 2361-2367 (2002).