Femtosecond carrier dynamics in implanted and highly annealed polycrystalline silicon

Semiconductor Science and Technology

Volumn 21, Issue 8, 2006, Pages 1041-1046

  Lioudakis, Emmanouil ^a   Nassiopoulou, A G ^b   Othonos, Andreas ^a  

^a UNIVERSITY OF CYPRUS   (Cyprus)

^b INSTITUTE OF NANOSCIENCE AND NANOTECHNOLOGY   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIFFERENTIAL EQUATIONS; DIFFUSION; SILICON;

AUGER COEFFICIENTS; CARRIER DYNAMICS; SILICON FILMS;

POLYCRYSTALLINE MATERIALS;

EID: 33749042789     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/21/8/010     Document Type: Article

References (14)

1. Shah J 1999 Ultrafast Spectroscopy of Semiconductors and Semiconductor Nanostructures (Berlin: Springer)
2. Othonos A 1998 Appl. Phys. Rev. 83 1789
3. Sabbah A J and Riffe D M 2002 Phys. Rev. B 66 165217
4. Kuhl J, Göbel E O, Pfeiffer Th and Jonietz A 1984 Appl. Phys. A 34 105
5. Wright O B, Zammit U, Marinelli M and Gusev V E 1996 Appl. Phys. Lett. 69 553
6. Doany F E, Grischkowsky D and Chi C C 1987 Appl. Phys. Lett. 50 460
7. Lioudakis E, Nassiopoulou A G and Othonos A 2006 Thin Solid Films 496 253
8. Takayuki Tanaka, Akira Harata and Tsuguo Sawada 1997 J. Appl. Phys. 82 4033
9. Hoffman C A, Jarasiunas K, Gerritsen H J and Narmikko A V 1978 Appl. Phys. Lett. 33 536
10. Othonos A and Christofides C 2002 Phys. Rev. B 66 085206
11. Landolt-Bornstein 1982 Numerical Data and Functional Relationships in Science and Technolgy vol 17 ed O Madeling, M Schult and H Weisst (New York: Springer)
12. Yoffa Ellen J 1980 Phys. Rev. B 21 2415
13. Sokolowksi-Tinten and von der Linde D 2000 Phys. Rev. B 61 2643
14. Wagner J and Del Alamo J A 1988 J. Appl. Phys. 63 425