Novel characteristics of multifunctional fluid filters fabricated by high-energy synchrotron radiation lithography

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 9 A, 2006, Pages 7203-7208

  Ukita, Yosiaki ^a   Asano, Toshifumi ^a   Fujiwara, Kuniyo ^a   Yokoyama, Takuya ^b   Matsui, Katsuhiro ^a   Takeo, Masahiro ^a   Negoro, Seiji ^a   Saiki, Tsunemasa ^c   Utsumi, Yuichi ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b Pias Tower   (Japan)

^c HYOGO PREFECTURAL INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Computational fluid dynamics; Deep X ray lithography; Fluid filter; High throughput; Microfluidics; Vertical fluid flow operation

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; FLUIDIC DEVICES; LITHOGRAPHY; SURFACE TENSION; SYNCHROTRON RADIATION;

DEEP X-RAY LITHOGRAPHY; FLUID FILTERS; HIGH THROUGHPUT; MICROFLUIDICS; VERTICAL FLUID FLOW OPERATION;

FILTERS (FOR FLUIDS);

EID: 33749016457     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.7203     Document Type: Article

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