Two-dimensional MEMS scanner for dual-axes confocal in vivo microscopy

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 862-865

  Ra, H ^a   Taguchi, Y ^a   Lee, D ^a   Piyawattanametha, W ^b,c   Solgaard, O ^a  

^a STANFORD UNIVERSITY   (United States)

^b STANFORD UNIVERSITY   (United States)

^c NATIONAL ELECTRONICS AND COMPUTER TECHNOLOGY CENTER   (Thailand)

Author keywords

[No Author keywords available]

Indexed keywords

CONFORMAL MAPPING; HIGH RESOLUTION ELECTRON MICROSCOPY; SCANNING; SILICON ON INSULATOR TECHNOLOGY; WSI CIRCUITS;

CONFOCAL MICROSCOPY; ELECTROSTATIC COMBDRIVES; MINIATURIZATION; REFLECTANCE IMAGES;

MICROELECTROMECHANICAL DEVICES;

EID: 33748920611     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. J. Pawley, ed., Handbook of Biological Confocal Microscopy, 3rd ed., Plenum, New York, 1996.
2. M. R. Harris, "Scanning confocal microscope including a single fiber for transmitting light to and receiving light from an object", U.S. Patent Number 5 120 953, June 1992.
3. L. Giniunas, R. Juskaitis, and S.V. Shatalin, "Scanning fibre-optic microscope", Electronics Letters, vol. 27, pp. 724-726, 1991.
4. D. L. Dickensheets, and G. S. Kino, "Silicon-micromachined scanning confocal microscope", J. Microelectromech. Syst., vol. 7, pp. 38-57, 1998.
5. W. Piyawattanametha, H. Toshiyoshi, J. LaCosse, and M. C. Wu, "Surface-micromachined confocal scanning optical microscope", in Tech. Digest Series of Conference on Lasers and Electro-Optics (CLEO), San Francisco, May 8-12, 2000, pp. 447-448.
6. T. D. Wang, M. J. Mandella, C. H. Contag, and G. S. Kino, "Dual-axis confocal microscope for high-resolution in vivo imaging", Optics Letters, vol. 28, pp. 414-416, 2003.
7. T. D. Wang, C. H. Contag, M. J. Mandella, N. Y. Chan, and G. S. Kino, "Dual-axes confocal microscopy with post-objective scanning and low coherence heterodyne detection", Optics Letters, vol. 28, pp. 1915-1917, 2003.
8. D. Lee and O. Solgaard, "Two-axis gimbaled microscanner in double SOI layers actuated by self-aligned vertical electrostatic combdrive", Tech. Digest of Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head), Hilton Head Island, June 6-10, 2004, pp. 352-355.
9. C. Ataman and H. Urey, "Nonlinear frequency response of Comb-Driven Microscanners", Proc. SPIE, vol. 5348, pp. 166-174, 2004.