Nano-size crystallites in Mo/Si multilayer optics

Thin Solid Films

Volumn 515, Issue 2 SPEC. ISS., 2006, Pages 430-433

  van de Kruijs, R W E ^a   Zoethout, E ^a   Yakshin, A E ^a   Nedelcu, I ^a   Louis, E ^a   Enkisch, H ^b   Sipos, G ^b   Mullender S ^b   Bijkerk, F ^a  

^a FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

^b CARL ZEISS SMT AG   (Germany)

Author keywords

Crystallization; Multilayers; Thin film growth; X ray diffraction

Indexed keywords

CRYSTALLINE MATERIALS; CRYSTALLIZATION; DEFORMATION; ELECTRON BEAMS; MULTILAYERS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

CRYSTALLINE PROPERTIES; LATTICE STRAINS; SUBSTRATE DEFORMATIONS; THIN FILM GROWTHS;

MICROOPTICS;

EID: 33748886676     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.252     Document Type: Article

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