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Volumn 1, Issue , 2003, Pages 53-56

Radioactively powered pressure transducer with RF pulse output

Author keywords

Dielectrics; Electrodes; Electron emission; Ionization; Micromechanical devices; Pressure measurement; Pulse generation; Radio frequency; Radioactive materials; Transducers

Indexed keywords

ACTUATORS; DIELECTRIC MATERIALS; ELECTRIC EXCITATION; ELECTRODES; ELECTRON EMISSION; IONIZATION; MICROSYSTEMS; NANOCANTILEVERS; PRESSURE MEASUREMENT; RADIOACTIVE MATERIALS; SOLID-STATE SENSORS; TRANSDUCERS;

EID: 33748791541     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215251     Document Type: Conference Paper
Times cited : (9)

References (7)
  • 1
    • 0037101036 scopus 로고    scopus 로고
    • Self-reciprocating Radioisotope-powered Cantilever
    • H. Li, A. Lal, J. Blanchard and D. Henderson, "Self-reciprocating Radioisotope-powered Cantilever", J. Appl. Phys., 92, 1122-27(2002).
    • (2002) J. Appl. Phys. , vol.92 , pp. 1122-1127
    • Li, H.1    Lal, A.2    Blanchard, J.3    Henderson, D.4
  • 2
    • 0035948963 scopus 로고    scopus 로고
    • Thermal Vacuum Sensor with Compensation of Heat Transfer
    • T. M. Berlicki, "Thermal Vacuum Sensor with Compensation of Heat Transfer", Sensors and Actuator A, 93, 27-32(2001).
    • (2001) Sensors and Actuator A , vol.93 , pp. 27-32
    • Berlicki, T.M.1
  • 3
    • 0032136371 scopus 로고    scopus 로고
    • Vacuum-sealed Silicon Micormachined Pressure Sensors
    • M. Esashi, S.Sugiyama, etc. al, "Vacuum-sealed Silicon Micormachined Pressure Sensors", Proceedings of the IEEE, 86, 1627-39 (1998).
    • (1998) Proceedings of the IEEE , vol.86 , pp. 1627-1639
    • Esashi, M.1    Sugiyama, S.2
  • 4
    • 0034318264 scopus 로고    scopus 로고
    • Wide Dynamic Range Silicon Diaphragm Vacuum Sensor by Electrostatic Servo System
    • H. Miyashita and M. Esashi, "Wide Dynamic Range Silicon Diaphragm Vacuum Sensor by Electrostatic Servo System", J. Vac. Sci. Technol. B, 18, 2692-7 (2000)
    • (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 2692-2697
    • Miyashita, H.1    Esashi, M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.