Evaluation of the thermodynamic data of CH3SiCI3 based on quantum chemistry calculations

Journal of Physical and Chemical Reference Data

Volumn 35, Issue 3, 2006, Pages 1385-1390

  Zeng, Qingfeng ^a,b   Su, Kehe ^c   Zhang, Litong ^a   Xu, Yongdong ^a   Cheng, Lalfel ^a   Yan, Xiutian ^b  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

^b UNIVERSITY OF STRATHCLYDE   (United Kingdom)

^c NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

Author keywords

CH3sicl3; G3 theories; G3MP2; Gibbs free energy; Quantum chemistry

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CHLORINE COMPOUNDS; FREE ENERGY; GIBBS FREE ENERGY; OXIDATION RESISTANCE; QUANTUM CHEMISTRY; SILICON CARBIDE; THERMOANALYSIS;

CH3SICL3; CHEMICAL VAPOR DEPOSITIONS (CVD); DECOMPOSITION PRODUCTS; G3 THEORIES; G3MP2; GIBBS ENERGY OF FORMATION; QUANTUM CHEMISTRY CALCULATIONS; THERMODYNAMIC CALCULATIONS;

SILICON COMPOUNDS;

EID: 33748627990     PISSN: 00472689     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2201867     Document Type: Article

References (19)

1. U. Trabandt, H. G. Wulz, and T. Schmid, Key Eng. Mater. 164-165, 445 (1999).
2. C. C. Liu, C. Lee, K. L. Cheng, H. C. Cheng, and T. R. Yew, Appl. Phys. Lett. 66, 168 (1995).
3. J. I. Kim, W. J. Kim, D. J. Choi, and J. Y. Park, J. Nucl. Mater. 307-311, 1084 (2002).
4. K. Minato and K. Fukuda, J. Mater. Sci. 23, 699 (1988).
5. J. H. Oh, B. J. Oh, D. J. Choi, G. H. Kim, and H. S. Song, J. Mater. Sci. 36, 1695 (2001).
6. R. J. Liu, C. R. Zhang, X. G. Zhou, and Y. B. Cao, J. Cryst. Growth 270, 124 (2004).
7. H. Sone, T. Kaneko, and N. Miyakawa, J. Cryst. Growth 219, 245 (2000).
8. S. Goujard, L. Vandenbuleke, and C. Bernard, CALPHAD: Comput. Coupling Phase Diagrams Thermoehem. 18, 369 (1994).
9. Q. S. Zhu, X. L. Qiu, and C. W. Ma, Eng. Chem. Metall. 19, 193 (1998).
10. M. W. Chase, Jr., C. A. Davies, J. R. Downey, Jr., D. J. Frurip, R. A. McDonald, and A. N. Syverud, JANAF Thermochemical Tables, 3rd ed., Parts I and II, J. Phys. Chem. Ref. Data 14, Suppl. 1 (1985).
11. M. W. Chase, Jr., NIST-JANAF Thermochemical Tables, 4th ed., J. Phys. Chem. Ref. Data, Monograph No. 9 (1998).
12. The Royal Swedish Academy of Sciences, Press Release: The 1998 Nobel Prize in Chemistry, 〈http://www.nobel.se/chemistry/laureates/1998/ press.html〉 (1998).
13. L. A. Curtiss, P. C. Redfern, K. Raghavachari, V. Rassolov, and J. A. Pople, J. Chem. Phys. 110, 4703 (1999).
14. L. A. Curtiss, K. Raghavachari, P. C. Redfern, V. Rassolov, and J. A. Pople, J. Chem. Phys. 109, 7764 (1998).
15. G. B. Anwar, L. A. Curtiss, P. C. Redfern, and K. Raghavachari, J. Chem. Phys. 110, 7650 (1999).
16. 〈http://chemistry.anl.gov/condmat/G2/97.html〉
17. L. A. Curtiss, K. Raghavachari, P. C. Redfern, and J. A. Pople, J. Chem. Phys. 106, 1063 (1997).
18. M. J. Frisch et al., Gaussian 03W, Revision B.05 (Gaussian, Inc., Pittsburgh, PA, 2003).
19. J. W. Ochterski, G. A. Petersson, and J. A. Montgomery, Jr., J. Chem. Phys. 104, 2598 (1996).