High-volume PVD coating of precision components of large volumes at low process costs

Surface and Coatings Technology

Volumn 123, Issue 2-3, 2000, Pages 288-293

  Hans, M ^a   Buchel R ^a   Grischke, M ^a   Hobi, R ^a   Zach M ^a  

^a Balzers AG   (Liechtenstein)

Author keywords

High volume PVD coating; Multi chamber system

Indexed keywords

SUBSTRATES; VAPOR DEPOSITION;

MULTI-CHAMBER SYSTEMS; PHYSICAL VAPOR DEPOSITION (PVD);

PROTECTIVE COATINGS;

COATING; DEPOSITION; DIAMOND-LIKE CARBON; FILM; WEAR RESISTANCE;

EID: 0343527223     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00477-6     Document Type: Article

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