Si/TiOX/Pt/TaOX electrodes fabricated by sputtering for electrochemical ozone generation

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 8 A, 2006, Pages 6417-6419

  Kaneda, Kazuhiro ^a,b   Ikematsu, Mineo ^a   Kitsuka, Kenta ^a   Iseki, Masahiro ^a   Matsuura, Hidefumi ^a   Higuchi, Tohru ^b   Hattori, Takeshi ^b   Tsukamoto, Takeyo ^b   Yasuda, Masashi ^a  

^a SANYO ELECTRIC CO LTD   (Japan)

^b TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

Catalyst; Electrolysis; Energy band; Flat band potential; Ozone; Perchloric acid; Platinum; Silicon; Sputtering; Tantalum oxide

Indexed keywords

CATALYSTS; CURRENT DENSITY; ELECTROLYSIS; OZONE; PLATINUM; SILICON; SPUTTERING; TITANIUM OXIDES;

ENERGY BAND; FLAT BAND POTENTIAL; PERCHLORIC ACID; TANTALUM OXIDE;

ELECTROCHEMICAL ELECTRODES;

EID: 33748546298     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.6417     Document Type: Article

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