Commercial importance of a unit cell: Nanolithographic patenting trends for microsystems, microfabrication, and nanotechnology

Journal of Microlithography, Microfabrication and Microsystems

Volumn 5, Issue 1, 2006, Pages

  Eijkel, K ^a   Hruby, J ^b   Kubiak, G ^b   Scott, M ^b   Brokaw, J ^b   Saile, V ^c   Walsh, Steven ^d   White, Craig ^d   Walsh, Daniel ^e  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c UNIVERSITY OF KARLSRUHE   (Germany)

^d UNIVERSITY OF NEW MEXICO   (United States)

^e CALIFORNIA POLYTECHNIC STATE UNIVERSITY   (United States)

Author keywords

Microfabrication; Microsystems; Nano patterning; Nanotechnology

Indexed keywords

MICROFABRICATION; MICROSYSTEMS; MOORE'S LAW; UNIT CELLS;

FABRICATION; INTELLECTUAL PROPERTY; NANOTECHNOLOGY; SEMICONDUCTOR MATERIALS;

PHOTOLITHOGRAPHY;

EID: 33748534107     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2183318     Document Type: Article

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